Chapter 4. Basic Technologies in MEMS

  1. Prof. Dr. W. Menz1,
  2. Dr. J. Mohr2 and
  3. Prof. Dr. O. Paul1

Published Online: 14 DEC 2007

DOI: 10.1002/9783527613007.ch04

Microsystem Technology

Microsystem Technology

How to Cite

Menz, W., Mohr, J. and Paul, O. (2000) Basic Technologies in MEMS, in Microsystem Technology, Wiley-VCH Verlag GmbH, Weinheim, Germany. doi: 10.1002/9783527613007.ch04

Author Information

  1. 1

    IMTEK (Institut für Mikrosystemtechnik) Albert-Ludwigs-Universität Georges-Köhler-Allee 103 D-79110 Freiburg

  2. 2

    Institut für Mikrostrukturtechnik Forschungszentrum Karlsruhe Postfach 3640 D-76201 Karlsruhe

Publication History

  1. Published Online: 14 DEC 2007
  2. Published Print: 20 DEC 2000

ISBN Information

Print ISBN: 9783527296347

Online ISBN: 9783527613007



  • vacuum technology;
  • atom velocity;
  • technical vacuum;
  • vacuum measurement;
  • vacuum gauge


This chapter contains sections titled:

  • Basic Principles of Vacuum Technology

  • Vacuum Production

  • Vacuum Measurement

  • Properties of Thin Films

  • Physical and Chemical Coating Techniques

  • Structuring of Thin Films with Dry Etch Processes

  • Analysis of Thin Films and Surfaces