Chapter 6. Silicon Microsystem Technology

  1. Prof. Dr. W. Menz1,
  2. Dr. J. Mohr2 and
  3. Prof. Dr. O. Paul1

Published Online: 14 DEC 2007

DOI: 10.1002/9783527613007.ch06

Microsystem Technology

Microsystem Technology

How to Cite

Menz, W., Mohr, J. and Paul, O. (2000) Silicon Microsystem Technology, in Microsystem Technology, Wiley-VCH Verlag GmbH, Weinheim, Germany. doi: 10.1002/9783527613007.ch06

Author Information

  1. 1

    IMTEK (Institut für Mikrosystemtechnik) Albert-Ludwigs-Universität Georges-Köhler-Allee 103 D-79110 Freiburg

  2. 2

    Institut für Mikrostrukturtechnik Forschungszentrum Karlsruhe Postfach 3640 D-76201 Karlsruhe

Publication History

  1. Published Online: 14 DEC 2007
  2. Published Print: 20 DEC 2000

ISBN Information

Print ISBN: 9783527296347

Online ISBN: 9783527613007

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Keywords:

  • silicon technology;
  • silicon micromachining;
  • surface micromachining;
  • micro transducers;
  • chemical microsensors

Summary

This chapter contains sections titled:

  • Silicon Technology

  • Silicon Micromachining

  • Surface Micromachining

  • Micro Transducers and Systems Based on Silicon Technology

  • Summary and Outlook