Chapter 7. The LIGA Process

  1. Prof. Dr. W. Menz1,
  2. Dr. J. Mohr2 and
  3. Prof. Dr. O. Paul1

Published Online: 14 DEC 2007

DOI: 10.1002/9783527613007.ch07

Microsystem Technology

Microsystem Technology

How to Cite

Menz, W., Mohr, J. and Paul, O. (2000) The LIGA Process, in Microsystem Technology, Wiley-VCH Verlag GmbH, Weinheim, Germany. doi: 10.1002/9783527613007.ch07

Author Information

  1. 1

    IMTEK (Institut für Mikrosystemtechnik) Albert-Ludwigs-Universität Georges-Köhler-Allee 103 D-79110 Freiburg

  2. 2

    Institut für Mikrostrukturtechnik Forschungszentrum Karlsruhe Postfach 3640 D-76201 Karlsruhe

Publication History

  1. Published Online: 14 DEC 2007
  2. Published Print: 20 DEC 2000

ISBN Information

Print ISBN: 9783527296347

Online ISBN: 9783527613007

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Keywords:

  • LIGA process;
  • mask production;
  • x-ray lithography;
  • galvanic deposition;
  • fluidic microstructures

Summary

This chapter contains sections titled:

  • Overview

  • Mask Production

  • X-ray Lithography

  • Galvanic Deposition

  • Plastic Molding in the LIGA Process

  • Variations and Additional Steps of the LIGA Technology

  • Examples of Applications