Chapter 2. Precursor Chemistry

  1. Prof. Anthony C. Jones1 and
  2. Prof. Paul O'Brien2

Published Online: 7 OCT 2008

DOI: 10.1002/9783527614639.ch2

CVD of Compound Semiconductors: Precursor Synthesis, Development and Applications

CVD of Compound Semiconductors: Precursor Synthesis, Development and Applications

How to Cite

Jones, A. C. and O'Brien, P. (1997) Precursor Chemistry, in CVD of Compound Semiconductors: Precursor Synthesis, Development and Applications, Wiley-VCH Verlag GmbH, Weinheim, Germany. doi: 10.1002/9783527614639.ch2

Author Information

  1. 1

    Rosetree Cottage, Georgian Close, Eccleston Park, Prescot, Merseyside L35 7JW, United Kingdom

  2. 2

    Department of Chemistry, Imperial College of Science, Technology and Medicine, South Kensington, London SW7 2AY, United Kingdom

Publication History

  1. Published Online: 7 OCT 2008
  2. Published Print: 10 APR 1997

ISBN Information

Print ISBN: 9783527292943

Online ISBN: 9783527614639

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Keywords:

  • MOVPE and CBE;
  • aluminum-carbon bond;
  • trimethylaluminum;
  • di-i-pentylether;
  • hydroxyl-bridged dimer

Summary

The prelims comprise:

  • Introduction

  • Group IIIA Metalorganic Precursors

  • Analysis Techniques

  • Purification of Group III Trialkyl Compounds

  • Group II Metalorganic Precursors

  • Purification of Group II Precursors

  • Compounds of Phosphorus, Arsenic and Antimony

  • Group VI Metalorganic Precursors

  • Thermal Stability of Metalorganic Precursors

  • References