Chapter 6. Atomic Layer Epitaxy
Published Online: 7 OCT 2008
Copyright © 1997 VCH Verlagsgesellschaft mbH
CVD of Compound Semiconductors: Precursor Synthesis, Development and Applications
How to Cite
Jones, A. C. and O'Brien, P. (1997) Atomic Layer Epitaxy, in CVD of Compound Semiconductors: Precursor Synthesis, Development and Applications, Wiley-VCH Verlag GmbH, Weinheim, Germany. doi: 10.1002/9783527614639.ch6
- Published Online: 7 OCT 2008
- Published Print: 10 APR 1997
Print ISBN: 9783527292943
Online ISBN: 9783527614639
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