Chapter 6. Atomic Layer Epitaxy
Published Online: 7 OCT 2008
Copyright © 1997 VCH Verlagsgesellschaft mbH
CVD of Compound Semiconductors: Precursor Synthesis, Development and Applications
How to Cite
Jones, A. C. and O'Brien, P. (1997) Atomic Layer Epitaxy, in CVD of Compound Semiconductors: Precursor Synthesis, Development and Applications, Wiley-VCH Verlag GmbH, Weinheim, Germany. doi: 10.1002/9783527614639.ch6
- Published Online: 7 OCT 2008
- Published Print: 10 APR 1997
Print ISBN: 9783527292943
Online ISBN: 9783527614639
Options for accessing this content:
- If you are a society or association member and require assistance with obtaining online access instructions please contact our Journal Customer Services team.
- Login via other institutional login options http://onlinelibrary.wiley.com/login-options.
- You can purchase online access to this Chapter for a 24-hour period (price varies by title)
- If you already have a Wiley Online Library or Wiley InterScience user account: login above and proceed to purchase the article.
- New Users: Please register, then proceed to purchase the article.
Login via OpenAthens
Search for your institution's name below to login via Shibboleth.
Registered Users please login:
- Access your saved publications, articles and searches
- Manage your email alerts, orders and subscriptions
- Change your contact information, including your password
Please register to:
- Save publications, articles and searches
- Get email alerts
- Get all the benefits mentioned below!