Chapter 7. The Single Source Approach to the Deposition of Compound Semiconducting Materials by MOCVD and Related Methods
Published Online: 7 OCT 2008
DOI: 10.1002/9783527614639.ch7
Copyright © 1997 VCH Verlagsgesellschaft mbH
Book Title
CVD of Compound Semiconductors: Precursor Synthesis, Development and Applications
Additional Information
How to Cite
Jones, A. C. and O'Brien, P. (2008) The Single Source Approach to the Deposition of Compound Semiconducting Materials by MOCVD and Related Methods, in CVD of Compound Semiconductors: Precursor Synthesis, Development and Applications, Wiley-VCH Verlag GmbH, Weinheim, Germany. doi: 10.1002/9783527614639.ch7
Publication History
- Published Online: 7 OCT 2008
- Published Print: 10 APR 1997
ISBN Information
Print ISBN: 9783527292943
Online ISBN: 9783527614639
- Summary
- Chapter
- References
Keywords:
- crystal structure;
- thiomorpholine;
- pyramidal;
- bulky electropositive substituents;
- organoaluminum amide
Summary
The prelims comprise:
Introduction
Single Source Precursors for III-V Compounds
Single-Source Precursors for II-VI Materials
Precursors for the Deposition of III-VI Materials
References