Chapter 5. Insulating Materials

  1. Prof. William S. Rees Jr.
  1. Andrew R. Barron

Published Online: 19 DEC 2007

DOI: 10.1002/9783527614813.ch5

CVD of Nonmetals

CVD of Nonmetals

How to Cite

Barron, A. R. (1996) Insulating Materials, in CVD of Nonmetals (ed W. S. Rees), Wiley-VCH Verlag GmbH, Weinheim, Germany. doi: 10.1002/9783527614813.ch5

Editor Information

  1. School of Chemistry and Biochemistry, and School of Materials Science and Engineering, Georgia Institute of Technology, Altanta, GA, 30332-0400, USA

Publication History

  1. Published Online: 19 DEC 2007
  2. Published Print: 27 SEP 1996

ISBN Information

Print ISBN: 9783527292950

Online ISBN: 9783527614813

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Keywords:

  • isolation;
  • oxides;
  • silica;
  • aluminium;
  • transition metal

Summary

This chapter contains sections titled:

  • Introduction

  • Applications for Electrically Insulating Materials

  • General Considerations

  • Oxides

  • Nitrides

  • Sulfides

  • Fluorides

  • Concluding Remarks