Chapter 2. Chemical Vapor Deposition of Aluminum
- Prof. Dr. Toivo T. Kodas2 and
- Prof. Dr. Mark J. Hampden-Smith3
Published Online: 26 DEC 2007
Copyright © 1994 VCH Verlagsgesellschaft mbH
The Chemistry of Metal CVD
How to Cite
Simmonds, M. G. and Gladfelter, W. L. (1994) Chemical Vapor Deposition of Aluminum, in The Chemistry of Metal CVD (eds T. T. Kodas and M. J. Hampden-Smith), Wiley-VCH Verlag GmbH, Weinheim, Germany. doi: 10.1002/9783527615858.ch2
Department of Chemical Engineering, University of New Mexico, Albuquerque, NM 87131, USA
Department of Chemistry, University of New Mexico, Albuquerque, NM 87131, USA
- Published Online: 26 DEC 2007
- Published Print: 25 AUG 1994
Print ISBN: 9783527290710
Online ISBN: 9783527615858
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