Chapter 3. Chemical Vapor Deposition of Tungsten

  1. Prof. Dr. Toivo T. Kodas2 and
  2. Prof. Dr. Mark J. Hampden-Smith3
  1. Alfred A. Zinn

Published Online: 26 DEC 2007

DOI: 10.1002/9783527615858.ch3

The Chemistry of Metal CVD

The Chemistry of Metal CVD

How to Cite

Zinn, A. A. (1994) Chemical Vapor Deposition of Tungsten, in The Chemistry of Metal CVD (eds T. T. Kodas and M. J. Hampden-Smith), Wiley-VCH Verlag GmbH, Weinheim, Germany. doi: 10.1002/9783527615858.ch3

Editor Information

  1. 2

    Department of Chemical Engineering, University of New Mexico, Albuquerque, NM 87131, USA

  2. 3

    Department of Chemistry, University of New Mexico, Albuquerque, NM 87131, USA

Author Information

  1. Department of Chemistry & Biochemistry, University of California, Los Angeles, 405 Hilgard Avenue, Los Angeles, CA 90024-1569

Publication History

  1. Published Online: 26 DEC 2007
  2. Published Print: 25 AUG 1994

ISBN Information

Print ISBN: 9783527290710

Online ISBN: 9783527615858

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