Chapter 4. CVD of Copper from Cu(II) Precursors
- Prof. Dr. Toivo T. Kodas3 and
- Prof. Dr. Mark J. Hampden-Smith4
Published Online: 26 DEC 2007
Copyright © 1994 VCH Verlagsgesellschaft mbH
The Chemistry of Metal CVD
How to Cite
Griffin, G. L. and Maverick, A. W. (1994) CVD of Copper from Cu(II) Precursors, in The Chemistry of Metal CVD (eds T. T. Kodas and M. J. Hampden-Smith), Wiley-VCH Verlag GmbH, Weinheim, Germany. doi: 10.1002/9783527615858.ch4
Department of Chemical Engineering, University of New Mexico, Albuquerque, NM 87131, USA
Department of Chemistry, University of New Mexico, Albuquerque, NM 87131, USA
- Published Online: 26 DEC 2007
- Published Print: 25 AUG 1994
Print ISBN: 9783527290710
Online ISBN: 9783527615858
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