Chapter 5. Chemical Vapor Deposition of Copper from Cu(I) Compounds
- Prof. Dr. Toivo T. Kodas3 and
- Prof. Dr. Mark J. Hampden-Smith4
Published Online: 26 DEC 2007
Copyright © 1994 VCH Verlagsgesellschaft mbH
The Chemistry of Metal CVD
How to Cite
Hampden-Smith, M. J. and Kodas, T. T. (1994) Chemical Vapor Deposition of Copper from Cu(I) Compounds, in The Chemistry of Metal CVD (eds T. T. Kodas and M. J. Hampden-Smith), Wiley-VCH Verlag GmbH, Weinheim, Germany. doi: 10.1002/9783527615858.ch5
Department of Chemical Engineering, University of New Mexico, Albuquerque, NM 87131, USA
Department of Chemistry, University of New Mexico, Albuquerque, NM 87131, USA
- Published Online: 26 DEC 2007
- Published Print: 25 AUG 1994
Print ISBN: 9783527290710
Online ISBN: 9783527615858
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