Chapter 9. Overview of Metal CVD

  1. Prof. Dr. Toivo T. Kodas3 and
  2. Prof. Dr. Mark J. Hampden-Smith4
  1. Toivo T. Kodas1 and
  2. Mark J. Hampden-Smith2

Published Online: 26 DEC 2007

DOI: 10.1002/9783527615858.ch9

The Chemistry of Metal CVD

The Chemistry of Metal CVD

How to Cite

Kodas, T. T. and Hampden-Smith, M. J. (1994) Overview of Metal CVD, in The Chemistry of Metal CVD (eds T. T. Kodas and M. J. Hampden-Smith), Wiley-VCH Verlag GmbH, Weinheim, Germany. doi: 10.1002/9783527615858.ch9

Editor Information

  1. 3

    Department of Chemical Engineering, University of New Mexico, Albuquerque, NM 87131, USA

  2. 4

    Department of Chemistry, University of New Mexico, Albuquerque, NM 87131, USA

Author Information

  1. 1

    Departments of Chemical and Nuclear Engineering, University of New Mexico, Albuquerque, NM 87131

  2. 2

    Departments of Chemistry, University of New Mexico, Albuquerque, NM 87131

Publication History

  1. Published Online: 26 DEC 2007
  2. Published Print: 25 AUG 1994

ISBN Information

Print ISBN: 9783527290710

Online ISBN: 9783527615858

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Keywords:

  • chemical vapor deposition of metals;
  • classification of precursors;
  • blanket deposition;
  • precursor delivery;
  • selective deposition

Summary

This chapter contains sections titled:

  • Inhuductim

  • Classification of Precutsors

  • Blanket Deposition: Reaction Pathways

  • Selective Deposition

  • Overall Reactor Behavior

  • Precursor Delivery

  • Reactor Types: Hot-Wall and Cold-Wall

  • Boundary Layers; Feed-Rate-, Surface- Reaction-, and Diff usion-Limited Operation; and Temperature and Pressure Dependencies of Rate

  • Homogeneous Gas-Phase Reactions and Particle Formation

  • Conclusions and Future Directions