Chapter 10. CMOS-based Thermal Sensors

  1. Prof. Dr. O. Brand2 and
  2. Dr. G. K. Fedder3
  1. T. Akin

Published Online: 29 FEB 2008

DOI: 10.1002/9783527616718.ch10

CMOS - MEMS

CMOS - MEMS

How to Cite

Akin, T. (2005) CMOS-based Thermal Sensors, in CMOS - MEMS (eds O. Brand and G. K. Fedder), Wiley-VCH Verlag GmbH, Weinheim, Germany. doi: 10.1002/9783527616718.ch10

Editor Information

  1. 2

    School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA 30332-0250, USA

  2. 3

    ECE Department & The Robotics Institute, Carnegie Mellon, University, Pittsburgh, PA 15213-3890, USA

Author Information

  1. Department of Electrical and Electronics Engineering, Middle East Technical University, Ankara, Turkey

Publication History

  1. Published Online: 29 FEB 2008
  2. Published Print: 26 JAN 2005

ISBN Information

Print ISBN: 9783527310807

Online ISBN: 9783527616718

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Keywords:

  • thermal sensors;
  • uncooled infrared detectors;
  • microbolometers;
  • thermopiles, infrared detectors;
  • radiation sensors;
  • flow sensors;
  • thermal converters;
  • thermal flow sensors

Summary

This chapter contains sections titled:

  • Introduction

  • Thermal Radiation Sensors

  • Thermal Converters

  • Thermal Flow Sensors

  • Acknowledgements

  • References