Chapter 11. Circuit and System Integration

  1. Prof. Dr. O. Brand3 and
  2. Dr. G. K. Fedder4
  1. C. Hagleitner1 and
  2. K.-U. Kirstein2

Published Online: 29 FEB 2008

DOI: 10.1002/9783527616718.ch11

CMOS - MEMS

CMOS - MEMS

How to Cite

Hagleitner, C. and Kirstein, K.-U. (2005) Circuit and System Integration, in CMOS - MEMS (eds O. Brand and G. K. Fedder), Wiley-VCH Verlag GmbH, Weinheim, Germany. doi: 10.1002/9783527616718.ch11

Editor Information

  1. 3

    School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA 30332-0250, USA

  2. 4

    ECE Department & The Robotics Institute, Carnegie Mellon, University, Pittsburgh, PA 15213-3890, USA

Author Information

  1. 1

    IBM Research – Zurich Research Laboratory, Ruschlikon, Switzerland

  2. 2

    Physical Electronics Laboratory, ETH Zurich, Zurich, Switzerland

Publication History

  1. Published Online: 29 FEB 2008
  2. Published Print: 26 JAN 2005

ISBN Information

Print ISBN: 9783527310807

Online ISBN: 9783527616718

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Keywords:

  • sensor interface circuitry;
  • analog frontend;
  • serial interface;
  • resolution;
  • offset;
  • signal-to-noise ratio (SNR);
  • linearity;
  • bandwidth;
  • sensitivity;
  • drift;
  • wheatstone bridge;
  • instrumentation amplifier;
  • capacitive read-out;
  • analog filters;
  • switched-capacitor (SC) filters;
  • digital-to-analog converters (DAC);
  • analog-to-digital converters (ADC);
  • digital filter;
  • decimation filter;
  • parameter sensitivity;
  • 6 sigma design;
  • power consumption;
  • design for testability;
  • physical design verification

Summary

This chapter contains sections titled:

  • Introduction

  • Analog Frontend

  • Circuitry Building Blocks for CMOS MEMS/NEMS

  • System Integration

  • Example: a Single-Chip Gas-detection System

  • References