Chapter 3. Monolithically Integrated Inertial Sensors

  1. Prof. Dr. O. Brand4 and
  2. Dr. G. K. Fedder5
  1. G. K. Fedder5,
  2. J. Chae1,
  3. K. Najafi1,
  4. T. Denison2,
  5. J. Kuang2,
  6. S. Lewis2 and
  7. H. Kulah3

Published Online: 29 FEB 2008

DOI: 10.1002/9783527616718.ch3

CMOS - MEMS

CMOS - MEMS

How to Cite

Fedder, G. K., Chae, J., Najafi, K., Denison, T., Kuang, J., Lewis, S. and Kulah, H. (2008) Monolithically Integrated Inertial Sensors, in CMOS - MEMS (eds O. Brand and G. K. Fedder), Wiley-VCH Verlag GmbH, Weinheim, Germany. doi: 10.1002/9783527616718.ch3

Editor Information

  1. 4

    School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA 30332-0250, USA

  2. 5

    ECE Department & The Robotics Institute, Carnegie Mellon, University, Pittsburgh, PA 15213-3890, USA

Author Information

  1. 1

    Department of Electrical Engineering and Computer Sciences, University of Michigan, Ann Arbor, MI, USA

  2. 2

    Analog Devices, Inc., Cambridge, MA, USA

  3. 3

    Middle East Technical University, Ankara, Turkey

  4. 5

    ECE Department & The Robotics Institute, Carnegie Mellon, University, Pittsburgh, PA 15213-3890, USA

Publication History

  1. Published Online: 29 FEB 2008
  2. Published Print: 26 JAN 2005

ISBN Information

Print ISBN: 9783527310807

Online ISBN: 9783527616718

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Keywords:

  • inertial sensors;
  • accelerometers;
  • gyroscopes;
  • integrated CMOS MEMS

Summary

This chapter contains sections titled:

  • Introduction

  • Integrated Polysilicon Inertial Sensors

  • Thin-film Inertial Sensors within Foundry CMOS

  • Metal Inertial Sensors

  • Bulk Silicon Integrated MEMS Inertial Sensors

  • Future Prospects

  • References