Chapter 4. CMOS-MEMS Acoustic Devices

  1. Prof. Dr. O. Brand2 and
  2. Dr. G. K. Fedder3
  1. J. J. Neumann and
  2. K. J. Gabriel

Published Online: 29 FEB 2008

DOI: 10.1002/9783527616718.ch4



How to Cite

Neumann, J. J. and Gabriel, K. J. (2005) CMOS-MEMS Acoustic Devices, in CMOS - MEMS (eds O. Brand and G. K. Fedder), Wiley-VCH Verlag GmbH, Weinheim, Germany. doi: 10.1002/9783527616718.ch4

Editor Information

  1. 2

    School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA 30332-0250, USA

  2. 3

    ECE Department & The Robotics Institute, Carnegie Mellon, University, Pittsburgh, PA 15213-3890, USA

Author Information

  1. ECE Department Hamerschlag Hall, Carnegie Mellon University, Pittsburgh, PA, USA

Publication History

  1. Published Online: 29 FEB 2008
  2. Published Print: 26 JAN 2005

ISBN Information

Print ISBN: 9783527310807

Online ISBN: 9783527616718


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