Chapter 5. RF CMOS MEMS

  1. Prof. Dr. O. Brand1 and
  2. Dr. G. K. Fedder2
  1. T. Mukherjee and
  2. G. K. Fedder

Published Online: 29 FEB 2008

DOI: 10.1002/9783527616718.ch5

CMOS - MEMS

CMOS - MEMS

How to Cite

Mukherjee, T. and Fedder, G. K. (2005) RF CMOS MEMS, in CMOS - MEMS (eds O. Brand and G. K. Fedder), Wiley-VCH Verlag GmbH, Weinheim, Germany. doi: 10.1002/9783527616718.ch5

Editor Information

  1. 1

    School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA 30332-0250, USA

  2. 2

    ECE Department & The Robotics Institute, Carnegie Mellon, University, Pittsburgh, PA 15213-3890, USA

Author Information

  1. ECE Department & The Robotics Institute, Carnegie Mellon, University, Pittsburgh, PA 15213-3890, USA

Publication History

  1. Published Online: 29 FEB 2008
  2. Published Print: 26 JAN 2005

ISBN Information

Print ISBN: 9783527310807

Online ISBN: 9783527616718

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Keywords:

  • inductor;
  • capacitor;
  • varactor;
  • resonator;
  • filter;
  • switch

Summary

This chapter contains sections titled:

  • A Brief History of RF Integration

  • MEMS in RF Architectures

  • Micromachined RF Components

  • Circuits Based on RF CMOS MEMS

  • Conclusion

  • References