Chapter 6. CMOS-based Pressure Sensors

  1. Prof. Dr. O. Brand2 and
  2. Dr. G. K. Fedder3
  1. H.-J. Timme

Published Online: 29 FEB 2008

DOI: 10.1002/9783527616718.ch6

CMOS - MEMS

CMOS - MEMS

How to Cite

Timme, H.-J. (2008) CMOS-based Pressure Sensors, in CMOS - MEMS (eds O. Brand and G. K. Fedder), Wiley-VCH Verlag GmbH, Weinheim, Germany. doi: 10.1002/9783527616718.ch6

Editor Information

  1. 2

    School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA 30332-0250, USA

  2. 3

    ECE Department & The Robotics Institute, Carnegie Mellon, University, Pittsburgh, PA 15213-3890, USA

Author Information

  1. Infineon Technologies, Munich, Germany

Publication History

  1. Published Online: 29 FEB 2008
  2. Published Print: 26 JAN 2005

ISBN Information

Print ISBN: 9783527310807

Online ISBN: 9783527616718

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Keywords:

  • bulk micromachining;
  • surface micromachining;
  • pressure sensor;
  • diaphragm stress;
  • diaphragm deflection;
  • piezoresistor;
  • capacitive sensing;
  • switched capacitor circuits

Summary

This chapter contains sections titled:

  • Introduction

  • Micromachined Pressure Sensors

  • CMOS-integrated Pressure Sensors

  • Conclusion

  • References