Chapter 8. Lithographic Fabrication of Mold Inserts

  1. Prof. Dr.-Ing. Detlef Löhe2 and
  2. Prof. Dr. Jürgen Haußelt3
  1. M. Guttmann,
  2. J. Schulz and
  3. V. Saile

Published Online: 29 FEB 2008

DOI: 10.1002/9783527616725.ch8

Microengineering of Metals and Ceramics: Part I: Design, Tooling and Injection Molding

Microengineering of Metals and Ceramics: Part I: Design, Tooling and Injection Molding

How to Cite

Guttmann, M., Schulz, J. and Saile, V. (2005) Lithographic Fabrication of Mold Inserts, in Microengineering of Metals and Ceramics: Part I: Design, Tooling and Injection Molding (eds D. Löhe and J. Haußelt), Wiley-VCH Verlag GmbH, Weinheim, Germany. doi: 10.1002/9783527616725.ch8

Editor Information

  1. 2

    Institute of Materials Science and Engineering, Universität Karlsruhe, Kaiserstr. 12, 76131 Karlsruhe, Germany

  2. 3

    Institute for Materials Research III, Forschungszentrum Karlsruhe, Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany

Author Information

  1. Institute of Microstructure Technology, Forschungszentrum Karlsruhe, Germany

Publication History

  1. Published Online: 29 FEB 2008
  2. Published Print: 27 JUN 2005

ISBN Information

Print ISBN: 9783527312085

Online ISBN: 9783527616725

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Keywords:

  • lithography;
  • electroforming;
  • mold insert fabrication;
  • specifications;
  • reliability;
  • quality standards

Summary

This chapter contains sections titled:

  • Introduction

  • The LIGA Process for Mold Inserts

  • Advanced Issues in LIGA Fabrication

  • Conclusions

  • Acknowledgment

  • References