Chapter 22. Development of a Simulation Tool for Wear in Microsystems

  1. Prof. Dr.-Ing. Detlef Löhe4 and
  2. Prof. Dr. Jürgen Haußelt5
  1. V. Hegadekatte1,
  2. N. Huber2 and
  3. O. Kraft3

Published Online: 29 FEB 2008

DOI: 10.1002/9783527616732.ch10

Microengineering of Metals and Ceramics: Part II: Special Replication Techniques, Automation and Properties

Microengineering of Metals and Ceramics: Part II: Special Replication Techniques, Automation and Properties

How to Cite

Hegadekatte, V., Huber, N. and Kraft, O. (2005) Development of a Simulation Tool for Wear in Microsystems, in Microengineering of Metals and Ceramics: Part II: Special Replication Techniques, Automation and Properties (eds D. Löhe and J. Haußelt), Wiley-VCH Verlag GmbH, Weinheim, Germany. doi: 10.1002/9783527616732.ch10

Editor Information

  1. 4

    Institute of Materials Science and Engineering, Universität Karlsruhe, Kaiserstr. 12, 76131 Karlsruhe, Germany

  2. 5

    Institute for Materials Research III, Forschungszentrum Karlsruhe, Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany

Author Information

  1. 1

    Institute for Reliability of Components and Systems, University of Karlsruhe (TH), Germany

  2. 2

    Institute for Material Research II (IMF II), Forschungszentrum Karlsruhe, Germany

  3. 3

    Institute for Reliability of Components and Systems, University of Karlsruhe (TH), and Institute for Material Research II (IMF II), Forschungszentrum Karlsruhe, Germany

Publication History

  1. Published Online: 29 FEB 2008
  2. Published Print: 27 JUL 2005

ISBN Information

Print ISBN: 9783527314935

Online ISBN: 9783527616732

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Keywords:

  • wear;
  • wear modeling;
  • wear simulation;
  • micromachines;
  • microsystems

Summary

This chapter contains sections titled:

  • Introduction

  • Modeling and Simulation of Wear in the Literature

  • Development of the Wear Simulation Tool

  • Wear Simulation Using the Wear-Processor

  • Conclusion

  • Acknowledgment

  • References