Chapter 14. Microelectroforming of Metals

  1. Prof. Dr.-Ing. Detlef Löhe3 and
  2. Prof. Dr. Jürgen Haußelt4
  1. G. Schanz1 and
  2. K. Bade2

Published Online: 29 FEB 2008

DOI: 10.1002/9783527616732.ch2

Microengineering of Metals and Ceramics: Part II: Special Replication Techniques, Automation and Properties

Microengineering of Metals and Ceramics: Part II: Special Replication Techniques, Automation and Properties

How to Cite

Schanz, G. and Bade, K. (2005) Microelectroforming of Metals, in Microengineering of Metals and Ceramics: Part II: Special Replication Techniques, Automation and Properties (eds D. Löhe and J. Haußelt), Wiley-VCH Verlag GmbH, Weinheim, Germany. doi: 10.1002/9783527616732.ch2

Editor Information

  1. 3

    Institute of Materials Science and Engineering, Universität Karlsruhe, Kaiserstr. 12, 76131 Karlsruhe, Germany

  2. 4

    Institute for Materials Research III, Forschungszentrum Karlsruhe, Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany

Author Information

  1. 1

    Intstitute for Materials Research III (IMF III), Forschungszentrum Karlsruhe, Germany

  2. 2

    Institute for Microstructuretechnology, Forschungszentrum Karlsruhe, Germany

Publication History

  1. Published Online: 29 FEB 2008
  2. Published Print: 27 JUL 2005

ISBN Information

Print ISBN: 9783527314935

Online ISBN: 9783527616732

SEARCH

Keywords:

  • electrochemical deposition;
  • microelectroforming;
  • replication;
  • nickel;
  • metals;
  • alloys

Summary

This chapter contains sections titled:

  • Electrochemical Metal Deposition

  • Deposition of Alloys and Dispersions

  • Replication of Microstructured Polymer Molds

  • Process Perspectives for High Aspect Ratios

  • Auxiliary Process Steps

  • Conclusion and Outlook

  • Acknowledgments

  • References