Chapter 1. Process Engineering Methods and Microsystem Technology
- Dr.-Ing. Norbert Kockmann
Published Online: 29 FEB 2008
Copyright © 2006 WILEY-VCH Verlag GmbH & Co. KGaA
Micro Process Engineering: Fundamentals, Devices, Fabrication, and Applications
How to Cite
Kockmann, N. (2008) Process Engineering Methods and Microsystem Technology, in Micro Process Engineering: Fundamentals, Devices, Fabrication, and Applications (ed N. Kockmann), Wiley-VCH Verlag GmbH, Weinheim, Germany. doi: 10.1002/9783527616749.ch1
Laboratory for Design of Microsystems, University of Freiburg-IMTEK, Georges-Köhler-Allee 102, 79110 Freiburg, Germany
- Published Online: 29 FEB 2008
- Published Print: 6 FEB 2006
Print ISBN: 9783527312467
Online ISBN: 9783527616749
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