Chapter 10. Microfabrication in Metals and Polymers

  1. Dr.-Ing. Norbert Kockmann
  1. Jürgen J. Brandner1,
  2. Thomas Gietzelt1,
  3. Torsten Henning1,
  4. Manfred Kraut1,
  5. Holger Moritz2 and
  6. Wilhelm Pfleging3

Published Online: 29 FEB 2008

DOI: 10.1002/9783527616749.ch10

Micro Process Engineering: Fundamentals, Devices, Fabrication, and Applications

Micro Process Engineering: Fundamentals, Devices, Fabrication, and Applications

How to Cite

Brandner, J. J., Gietzelt, T., Henning, T., Kraut, M., Moritz, H. and Pfleging, W. (2006) Microfabrication in Metals and Polymers, in Micro Process Engineering: Fundamentals, Devices, Fabrication, and Applications (ed N. Kockmann), Wiley-VCH Verlag GmbH, Weinheim, Germany. doi: 10.1002/9783527616749.ch10

Editor Information

  1. Laboratory for Design of Microsystems, University of Freiburg-IMTEK, Georges-Köhler-Allee 102, 79110 Freiburg, Germany

Author Information

  1. 1

    Institute for Micro Process Engineering (IMVT), Forschungszentrum Karlsruhe, Germany

  2. 2

    Institute for Microstructure Technology (IMT), Forschungszentrum Karlsruhe, Germany

  3. 3

    Institute for Materials Science I (IMFI), Forschungszentrum Karlsruhe, Germany

Publication History

  1. Published Online: 29 FEB 2008
  2. Published Print: 6 FEB 2006

ISBN Information

Print ISBN: 9783527312467

Online ISBN: 9783527616749

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