Chapter 11. Silicon Microfabrication for Microfluidics

  1. Dr.-Ing. Norbert Kockmann
  1. Frank Goldschmidtböing,
  2. Michael Engler and
  3. Alexander Doll

Published Online: 29 FEB 2008

DOI: 10.1002/9783527616749.ch11

Micro Process Engineering: Fundamentals, Devices, Fabrication, and Applications

Micro Process Engineering: Fundamentals, Devices, Fabrication, and Applications

How to Cite

Goldschmidtböing, F., Engler, M. and Doll, A. (2006) Silicon Microfabrication for Microfluidics, in Micro Process Engineering: Fundamentals, Devices, Fabrication, and Applications (ed N. Kockmann), Wiley-VCH Verlag GmbH, Weinheim, Germany. doi: 10.1002/9783527616749.ch11

Editor Information

  1. Laboratory for Design of Microsystems, University of Freiburg-IMTEK, Georges-Köhler-Allee 102, 79110 Freiburg, Germany

Author Information

  1. Laboratory for Design of Microsystems, Department of Microsystems Engineering (IMTEK), University of Freiburg, Germany

Publication History

  1. Published Online: 29 FEB 2008
  2. Published Print: 6 FEB 2006

ISBN Information

Print ISBN: 9783527312467

Online ISBN: 9783527616749

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Keywords:

  • silicon microfabrication;
  • lithography;
  • etching;
  • deposition;
  • micropumps;
  • micro-dispensers;
  • micromixers

Summary

This chapter contains sections titled:

  • Silicon as a Design Material

  • Processes and Structures

  • Applications

  • Conclusion