Chapter 12. Microfabrication in Ceramics and Glass

  1. Dr.-Ing. Norbert Kockmann
  1. Regina Knitter1 and
  2. Thoma S. R. Dietrich2

Published Online: 29 FEB 2008

DOI: 10.1002/9783527616749.ch12

Micro Process Engineering: Fundamentals, Devices, Fabrication, and Applications

Micro Process Engineering: Fundamentals, Devices, Fabrication, and Applications

How to Cite

Knitter, R. and Dietrich, T. S. R. (2006) Microfabrication in Ceramics and Glass, in Micro Process Engineering: Fundamentals, Devices, Fabrication, and Applications (ed N. Kockmann), Wiley-VCH Verlag GmbH, Weinheim, Germany. doi: 10.1002/9783527616749.ch12

Editor Information

  1. Laboratory for Design of Microsystems, University of Freiburg-IMTEK, Georges-Köhler-Allee 102, 79110 Freiburg, Germany

Author Information

  1. 1

    Institute for Materials Research III, Forschungszentrum Karlsruhe, Germany

  2. 2

    Mikroglas Chemtech GmbH, Mainz, Germany

Publication History

  1. Published Online: 29 FEB 2008
  2. Published Print: 6 FEB 2006

ISBN Information

Print ISBN: 9783527312467

Online ISBN: 9783527616749

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Keywords:

  • ceramic injection molding;
  • tape casting;
  • stereolithography;
  • coating;
  • joining;
  • photoetchable glass;
  • FOTURAN

Summary

This chapter contains sections titled:

  • Introduction

  • Microfabrication of Ceramics

  • Microfabrication of Glass

  • Conclusions