Chapter 4. Plasma Engineering

  1. Prof. Richard C. Alkire2 and
  2. Prof. Dieter M. Kolb3
  1. Demetre J. Economou

Published Online: 4 MAR 2008

DOI: 10.1002/9783527616800.ch4

Advances in Electrochemical Science and Engineering, Volume 6

Advances in Electrochemical Science and Engineering, Volume 6

How to Cite

Economou, D. J. (1999) Plasma Engineering, in Advances in Electrochemical Science and Engineering, Volume 6 (eds R. C. Alkire and D. M. Kolb), Wiley-VCH Verlag GmbH, Weinheim, Germany. doi: 10.1002/9783527616800.ch4

Editor Information

  1. 2

    University of Illinois, Vice Chancellor for Research, 601 East John Street, Champaign, IL 61820-5711, USA

  2. 3

    University of Ulm Department of Electrochemistry, Albert-Einstein-Allee 47, D-89081 Ulm Germany

Author Information

  1. Plasma Processing Laboratory, Department of Chemical Engineering, University of Houston, Houston, TX 77204-4792

Publication History

  1. Published Online: 4 MAR 2008
  2. Published Print: 23 FEB 1999

ISBN Information

Print ISBN: 9783527295159

Online ISBN: 9783527616800

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Keywords:

  • sheath formation;
  • anisotropy mechanisms;
  • fluid model equations;
  • ambipolar diffusion;
  • plasma

Summary

This chapter contains sections titled:

  • Introduction

  • Plasma Physics

  • Plasma Chemistry

  • Plasma Reactor Configurations

  • Plasma Modeling and Simulation

  • Plasma Etching and Deposition Systems

  • Plasma and Surface Diagnostics

  • Plasma vs. Electrochemical Engineering

  • Concluding Remarks and Future Trends

  • References