Chapter 21. Plasma Interactions with Surfaces

  1. Boris M. Smirnov

Published Online: 29 DEC 2007

DOI: 10.1002/9783527617708.ch21

Physics of Ionized Gases

Physics of Ionized Gases

How to Cite

Smirnov, B. M. (2001) Plasma Interactions with Surfaces, in Physics of Ionized Gases, Wiley-VCH Verlag GmbH, Weinheim, Germany. doi: 10.1002/9783527617708.ch21

Author Information

  1. Russian Academy of Sciences

Publication History

  1. Published Online: 29 DEC 2007
  2. Published Print: 9 MAR 2001

ISBN Information

Print ISBN: 9780471175940

Online ISBN: 9783527617708

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Keywords:

  • cathode sputtering;
  • laser vaporization;
  • etching;
  • explosive emission;
  • secondary electron emission

Summary

This chapter contains sections titled:

  • Cathode Sputtering and Its Uses

  • Laser Vaporization

  • Etching

  • Explosive Emission

  • Secondary Electron Emission

  • Quenching of Excited Particles on Walls