Chapter 5.1. Developments in Manufacturing and Their Influence on Sensors: Ultra-Precision Machining: Nanometric Displacement Sensors

  1. Prof. Dr. Joachim Hesse2,
  2. Prof. Julian W. Gardner3 and
  3. Prof. Dr. Wolfgang Göpel†4
  1. E. Brinksmeier

Published Online: 14 FEB 2008

DOI: 10.1002/9783527619252.ch5a

Sensors Applications: 5 Volumes

Sensors Applications: 5 Volumes

How to Cite

Brinksmeier, E. (2005) Developments in Manufacturing and Their Influence on Sensors: Ultra-Precision Machining: Nanometric Displacement Sensors, in Sensors Applications: 5 Volumes (eds J. Hesse, J. W. Gardner and W. Göpel†), Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, Germany. doi: 10.1002/9783527619252.ch5a

Editor Information

  1. 2

    Carl Zeiss, Postfach 1380, 73447 Oberkochen, Germany

  2. 3

    University of Warwick, Division of Electrical & Electronic Engineering, Coventry CV 7AL, United Kingdom

  3. 4

    Institut für Physikalische und Theoretische Chemie, Universität Tübingen, Auf der Morgenstelle 8, 72076 Tübingen, Germany

Author Information

  1. Fachgebiet Fertigungsverfahren und Labor für Mikrozerspanung, Universität Bremen, Badgasteiner Str. 1, 28359 Bremen, Germany

Publication History

  1. Published Online: 14 FEB 2008
  2. Published Print: 25 MAY 2005

ISBN Information

Print ISBN: 9783527295654

Online ISBN: 9783527619252

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