Chapter 18. The Formation of a Solid from the Reaction SiCl4(g) + O2(g) = SiO2(s) + 2 Cl2(g)

  1. Prof. Dr. Norbert Auner2 and
  2. Prof. Dr. Johann Weis3
  1. Michael Binnewies,
  2. Andreas Kornick,
  3. Marion Jerzembeck,
  4. Andreas Wilkening and
  5. Heike Quellhorst

Published Online: 5 MAY 2008

DOI: 10.1002/9783527619924.ch18

Organosilicon Chemistry V: From Molecules to Materials

Organosilicon Chemistry V: From Molecules to Materials

How to Cite

Binnewies, M., Kornick, A., Jerzembeck, M., Wilkening, A. and Quellhorst, H. (2003) The Formation of a Solid from the Reaction SiCl4(g) + O2(g) = SiO2(s) + 2 Cl2(g), in Organosilicon Chemistry V: From Molecules to Materials (eds N. Auner and J. Weis), Wiley-VCH Verlag GmbH, Weinheim, Germany. doi: 10.1002/9783527619924.ch18

Editor Information

  1. 2

    Department of Inorganic Chemistry, University of Frankfurt, Marie-Curie-Straße 11, 60439 Frankfurt am Main, Germany

  2. 3

    Consortium of Electrochemical Industry GmbH, Zielstattstraße 20, 81379 Munich, Germany

Author Information

  1. Institut fur Anorganische Chemie, Universität Hannover Callinstr. 9, D-30167 Hannover, Germany Tel.: +49 511 7622254 — Fax: +49 511 76219032

Publication History

  1. Published Online: 5 MAY 2008
  2. Published Print: 26 SEP 2003

ISBN Information

Print ISBN: 9783527306701

Online ISBN: 9783527619924

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Keywords:

  • growth pattern;
  • CVD process;
  • chlorosiloxanes;
  • silicon dioxide;
  • aerosil

Summary

The reaction of silicon(iv) chloride with oxygen forming silicon dioxide is strongly exothermic. The equilibrium is completely on the product's side, but activation of the reaction needs considerably high temperatures. The target of our investigations was to understand the formation of a solid starting from small gaseous molecules as precursors. It was shown that during combustion of silicon(rv) chloride in oxygen a great variety of intermediate chlorosiloxanes have been detected. On the basis of their compositions, structures and stabilities, growth mechanisms of Si-O networks can be derived. The stepwise formation of solid SiCl2 can be described in terms of three basic reactions: i) formation of highly reactive 0=SiCi2, ii) insertion of O[DOUBLE BOND]SiCl2 into an Si-Cl bond and iii) thermally induced elimination of SiCl4 from the resulting chlorosiloxanes.