Chapter 2.4. Scanning Auger Microscopy (SAM) and Imaging X-Ray Photoelectron Spectroscopy (XPS)

  1. S. Amelinckx,
  2. D. van Dyck,
  3. J. van Landuyt and
  4. G. van Tendeloo

Published Online: 2 JUN 2008

DOI: 10.1002/9783527620524.ch4

Handbook of Microscopy: Methods II: Applications in Materials Science, Solid-State Physics and Chemistry, Volume 2

Handbook of Microscopy: Methods II: Applications in Materials Science, Solid-State Physics and Chemistry, Volume 2

How to Cite

Amelinckx, S., van Dyck, D., van Landuyt, J. and van Tendeloo, G. (eds) (1996) Scanning Auger Microscopy (SAM) and Imaging X-Ray Photoelectron Spectroscopy (XPS), in Handbook of Microscopy: Methods II: Applications in Materials Science, Solid-State Physics and Chemistry, Volume 2, Wiley-VCH Verlag GmbH, Weinheim, Germany. doi: 10.1002/9783527620524.ch4

Editor Information

  1. Electron Microscopy for Materials Science (EMAT), Universitty of Antwerp - RUCA, Groenenborgerlaan 171, 2020 Antwerp, Belgium

Publication History

  1. Published Online: 2 JUN 2008
  2. Published Print: 27 DEC 1996

ISBN Information

Print ISBN: 9783527294732

Online ISBN: 9783527620524

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Keywords:

  • X-ray photoelectron spectroscopy;
  • ultrahigh vacuum;
  • scanning auger microscopy;
  • cylindrical mirror analyzer;
  • microelectronics

Summary

The prelims comprise:

  • Introduction

  • Basic Principles of Auger Electron Spectroscopy (AES) and X-Ray Photoelectron Spectroscopy (XPS)

  • Scanning Auger Microscopy (SAM) and Imaging XPS