Chapter 4. Photolithography

  1. Prof. Kenneth A. Jackson3 and
  2. Prof. Dr. Wolfgang Schröter4
  1. Rainer Leuschner1 and
  2. Georg Pawlowski2

Published Online: 28 MAY 2008

DOI: 10.1002/9783527621828.ch4

Handbook of Semiconductor Technology: Processing of Semiconductors, Volume 2

Handbook of Semiconductor Technology: Processing of Semiconductors, Volume 2

How to Cite

Leuschner, R. and Pawlowski, G. (2000) Photolithography, in Handbook of Semiconductor Technology: Processing of Semiconductors, Volume 2 (eds K. A. Jackson and W. Schröter), Wiley-VCH Verlag GmbH, Weinheim, Germany. doi: 10.1002/9783527621828.ch4

Editor Information

  1. 3

    The University of Arizona, Arizona Materials Laboratory, 4715 E. Fort Lowell Road, Tucson, AZ 85712, USA

  2. 4

    IV. Physikalisches Institut der Georg-August-Universität Göttingen, Bunsenstraße 13–15, D-37073 Göttingen, Germany

Author Information

  1. 1

    Infineon Technology, Memory Products, Erlangen, Germany

  2. 2

    Clariant Japan K. K., BU Electronic Materials, Shizuoka, Japan

Publication History

  1. Published Online: 28 MAY 2008
  2. Published Print: 27 JUN 2000

ISBN Information

Print ISBN: 9783527298358

Online ISBN: 9783527621828

SEARCH

Options for accessing this content:

  • If you are a society or association member and require assistance with obtaining online access instructions please contact our Journal Customer Services team.
    http://wiley.force.com/Interface/ContactJournalCustomerServices_V2.
  • Login via other institutional login options http://onlinelibrary.wiley.com/login-options.
  • You can purchase online access to this Chapter for a 24-hour period (price varies by title)
    • If you already have a Wiley Online Library or Wiley InterScience user account: login above and proceed to purchase the article.
    • New Users: Please register, then proceed to purchase the article.

Login via OpenAthens

or

Search for your institution's name below to login via Shibboleth.

Please register to:

  • Save publications, articles and searches
  • Get email alerts
  • Get all the benefits mentioned below!

Register now >