Chapter 11. VHF Plasma Production for Solar Cells

  1. Prof. Riccardo d'Agostino4,
  2. Prof. Pietro Favia4,
  3. Prof. Yoshinobu Kawai5,
  4. Prof. Hideo Ikegami6,
  5. Prof. Noriyoshi Sato7 and
  6. Prof. Farzaneh Arefi-Khonsari8
  1. Y. Kawai1,
  2. Y. Takeuchi2,
  3. H. Mashima2,
  4. Y. Yamauchi3 and
  5. H. Takatsuka3

Published Online: 8 APR 2008

DOI: 10.1002/9783527622184.ch11

Advanced Plasma Technology

Advanced Plasma Technology

How to Cite

Kawai, Y., Takeuchi, Y., Mashima, H., Yamauchi, Y. and Takatsuka, H. (2007) VHF Plasma Production for Solar Cells, in Advanced Plasma Technology (eds R. d'Agostino, P. Favia, Y. Kawai, H. Ikegami, N. Sato and F. Arefi-Khonsari), Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, Germany. doi: 10.1002/9783527622184.ch11

Editor Information

  1. 4

    Department of Chemistry, University of Bari, Via Orabona 4, 70126 Bari, Italy

  2. 5

    Research Institute for Applied Mechanics, Kyushu University, Engineering Sciences, Kasugakoen 6-1, Kasuga, Fukuoka 816-8580, Japan

  3. 6

    National Institute for Fusion Science, Toki, Gifu 509-5292, Japan

  4. 7

    Graduate School of Engineering, Tohoku University, Kadan 4-17-113, Sendai 980-0815, Japan

  5. 8

    Laboratoire de Génie des Procédés, Plasma et Traitements de Surface, Université Pierre et Marie Curie, ENSCP, 11 rue Pierre et Marie Curie, 75231 Paris cedex 05, France

Author Information

  1. 1

    Research Institute for Applied Mechanics, Kyushu University, Kasugakoen 6-1, Kasuga, Fukuoka 816-8580, Japan

  2. 2

    Nagasaki Research & Development Center, Mitsubishi Heavy Industries Ltd., Fukahori, Nagasaki 851-0392, Japan

  3. 3

    Nagasaki Shipyard & Machinery Works, Mitsubishi Heavy Industries Ltd., Isahaya, Nagasaki 854-0065, Japan

Publication History

  1. Published Online: 8 APR 2008
  2. Published Print: 12 DEC 2007

ISBN Information

Print ISBN: 9783527405916

Online ISBN: 9783527622184

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Keywords:

  • VHF plasma;
  • production;
  • solar cells

Summary

This chapter contains sections titled:

  • Introduction

  • Characteristics of VHF H2 Plasma

  • Characteristics of VHF SiH4 Plasma

  • Characteristics of Large-Area VHF H2 Plasma

  • Short-Gap VHF Discharge H2 Plasma