Chapter 2. Plasma Sources and Reactor Configurations

  1. Prof. Riccardo d'Agostino2,
  2. Prof. Pietro Favia2,
  3. Prof. Yoshinobu Kawai3,
  4. Prof. Hideo Ikegami4,
  5. Prof. Noriyoshi Sato5 and
  6. Prof. Farzaneh Arefi-Khonsari6
  1. P. Colpo,
  2. T. Meziani and
  3. F. Rossi

Published Online: 8 APR 2008

DOI: 10.1002/9783527622184.ch2

Advanced Plasma Technology

Advanced Plasma Technology

How to Cite

Colpo, P., Meziani, T. and Rossi, F. (2007) Plasma Sources and Reactor Configurations, in Advanced Plasma Technology (eds R. d'Agostino, P. Favia, Y. Kawai, H. Ikegami, N. Sato and F. Arefi-Khonsari), Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, Germany. doi: 10.1002/9783527622184.ch2

Editor Information

  1. 2

    Department of Chemistry, University of Bari, Via Orabona 4, 70126 Bari, Italy

  2. 3

    Research Institute for Applied Mechanics, Kyushu University, Engineering Sciences, Kasugakoen 6-1, Kasuga, Fukuoka 816-8580, Japan

  3. 4

    National Institute for Fusion Science, Toki, Gifu 509-5292, Japan

  4. 5

    Graduate School of Engineering, Tohoku University, Kadan 4-17-113, Sendai 980-0815, Japan

  5. 6

    Laboratoire de Génie des Procédés, Plasma et Traitements de Surface, Université Pierre et Marie Curie, ENSCP, 11 rue Pierre et Marie Curie, 75231 Paris cedex 05, France

Author Information

  1. European Commission, Joint Research Centre, Institute for Health and Consumer Protection, 21020 Ispra (VA), Italy

Publication History

  1. Published Online: 8 APR 2008
  2. Published Print: 12 DEC 2007

ISBN Information

Print ISBN: 9783527405916

Online ISBN: 9783527622184

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Keywords:

  • plasma technology;
  • plasma sources;
  • reactor configuration

Summary

This chapter contains sections titled:

  • Introduction

  • Characteristics of ICP

    • Principle

    • Transformer Model

    • Technological Aspects

      • Matching

      • Capacitive Coupling

      • Standing Wave Effects

  • Sources and Reactor Configuration

    • Substrate Shape

      • Flat Substrates

      • Complex Three-Dimensional Shapes

      • Large Area Treatment

  • Conclusions