Chapter 7. Advanced Plasma Diagnostics for Thin-Film Deposition

  1. Prof. Riccardo d'Agostino2,
  2. Prof. Pietro Favia2,
  3. Prof. Yoshinobu Kawai3,
  4. Prof. Hideo Ikegami4,
  5. Prof. Noriyoshi Sato5 and
  6. Prof. Farzaneh Arefi-Khonsari6
  1. R. Engeln,
  2. M. C. M. van de Sanden,
  3. W. M. M. Kessels,
  4. M. Creatore and
  5. D. C. Schram

Published Online: 8 APR 2008

DOI: 10.1002/9783527622184.ch7

Advanced Plasma Technology

Advanced Plasma Technology

How to Cite

Engeln, R., van de Sanden, M. C. M., Kessels, W. M. M., Creatore, M. and Schram, D. C. (2007) Advanced Plasma Diagnostics for Thin-Film Deposition, in Advanced Plasma Technology (eds R. d'Agostino, P. Favia, Y. Kawai, H. Ikegami, N. Sato and F. Arefi-Khonsari), Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, Germany. doi: 10.1002/9783527622184.ch7

Editor Information

  1. 2

    Department of Chemistry, University of Bari, Via Orabona 4, 70126 Bari, Italy

  2. 3

    Research Institute for Applied Mechanics, Kyushu University, Engineering Sciences, Kasugakoen 6-1, Kasuga, Fukuoka 816-8580, Japan

  3. 4

    National Institute for Fusion Science, Toki, Gifu 509-5292, Japan

  4. 5

    Graduate School of Engineering, Tohoku University, Kadan 4-17-113, Sendai 980-0815, Japan

  5. 6

    Laboratoire de Génie des Procédés, Plasma et Traitements de Surface, Université Pierre et Marie Curie, ENSCP, 11 rue Pierre et Marie Curie, 75231 Paris cedex 05, France

Author Information

  1. Department of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands

Publication History

  1. Published Online: 8 APR 2008
  2. Published Print: 12 DEC 2007

ISBN Information

Print ISBN: 9783527405916

Online ISBN: 9783527622184

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Keywords:

  • plasma diagnostics;
  • thin-film deposition;
  • optical diagnostics

Summary

This chapter contains sections titled:

  • Introduction

  • Diagnostics Available to the (Plasma) Physicist

  • Optical Diagnostics

    • Thomson–Rayleigh and Raman Scattering

    • Laser-Induced Fluorescence

    • Absorption Techniques

    • Surface Diagnostics

  • Applications

    • Thomson–Rayleigh Scattering and Raman Scattering

    • Laser-Induced Fluorescence

    • Absorption Spectroscopy

    • Surface Diagnostics