Chapter 18. Dramatic Downsizing of Soft X-Ray Synchrotron Light Source from Compact to Tabletop

  1. Prof. Dr. Volker Saile3,4,
  2. Prof. Dr. Ulrike Wallrabe5,
  3. Prof. Dr. Osamu Tabata6,7 and
  4. Prof. Dr. Jan G. Korvink8,9
  1. Hironari Yamada1,2,
  2. Norio Toyosugi2,
  3. Dorian Minkov1 and
  4. Yoshiko Okazaki1

Published Online: 5 AUG 2009

DOI: 10.1002/9783527622573.ch18

LIGA and Its Applications

LIGA and Its Applications

How to Cite

Yamada, H., Toyosugi, N., Minkov, D. and Okazaki, Y. (2008) Dramatic Downsizing of Soft X-Ray Synchrotron Light Source from Compact to Tabletop, in LIGA and Its Applications (eds V. Saile, U. Wallrabe, O. Tabata and J. G. Korvink), Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, Germany. doi: 10.1002/9783527622573.ch18

Editor Information

  1. 3

    Institut für Mikrostrukturtechnik, Forschungszentrum Karlsruhe, Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany

  2. 4

    Universität Karlsruhe and Forschungszentum Karlsruhe, Institut für Mikrostrukturtechnik, 76021 Karlsruhe, Germany

  3. 5

    Universität Freiburg, Iustitut für Mikrosystemtechnik Arbeitsgruppe Mikroaktorik, Georges-Köhler-Allee 102, 79110 Freiburg, Germany

  4. 6

    Kyoto University, Graduate School of Engineering, Department of Micro Engineering, Yoshida-Honmachi, Sakyo-ku, Kyoto 606-8501, Japan

  5. 7

    Department of Mechanical Engineering, Kyoto University, Yoshida Honmachi Sakyo-ku, 606-8501 Kyoto, Japan

  6. 8

    Institute for Microsystem Technology (IMTEK), Albert-Ludwigs-Universität Freiburg, Georges-Köhler-Allee 103, 79110 Freiburg, Germany

  7. 9

    Laboratory for Design of Microsystems, University of Freiburg–IMTEK, Georges-Köhler-Allee 102, 79110 Freiburg, Germany

Author Information

  1. 1

    Ritsumeikan University, Synchrotron Light Life Science Center, 1-1-1 Nojihigashi, Kusatsu City, Shiga 525-8577, Japan

  2. 2

    Photon Production Laboratory Ltd, 4-2-1 (808) Takagai Cho Minami, Omihachiman City, Shiga 523-0898, Japan

Publication History

  1. Published Online: 5 AUG 2009
  2. Published Print: 26 NOV 2008

Book Series:

  1. Advanced Micro and Nanosystems

Book Series Editors:

  1. Oliver Brand10,
  2. Prof. Dr. Gary K. Fedder11,
  3. Prof. Dr. Christopher Hierold12,
  4. Prof. Dr. Jan G. Korvink9 and
  5. Prof. Dr. Osamu Tabata7

Series Editor Information

  1. 7

    Department of Mechanical Engineering, Kyoto University, Yoshida Honmachi Sakyo-ku, 606-8501 Kyoto, Japan

  2. 9

    Laboratory for Design of Microsystems, University of Freiburg–IMTEK, Georges-Köhler-Allee 102, 79110 Freiburg, Germany

  3. 10

    School of Electrical and Computer Engineering, Georgia Institute of Technology, 777 Atlantic Drive, Atlanta, GA 30332-0250, USA

  4. 11

    ECE Department & Robotics Institute, Carnegie Mellon University, Pittsburgh, PA 15213-3890, USA

  5. 12

    Chair of Micro- and Nanosystems, ETH Zürich, ETH Zentrum, CLA H9, Tannenstrasse 3, 8092 Zürich, Switzerland

ISBN Information

Print ISBN: 9783527316984

Online ISBN: 9783527622573

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