Chapter 1. Valve Metal, Si and Ceramic Oxides as Dielectric Films for Passive and Active Electronic Devices

  1. Prof. Richard C. Alkire2,
  2. Prof. Dieter M. Kolb3,
  3. Prof. Jacek Lipkowski4 and
  4. Prof. Philip N. Ross5
  1. Alexander Michaelis

Published Online: 30 OCT 2008

DOI: 10.1002/9783527625307.ch1

Electrochemical Surface Modification: Thin Films, Functionalization and Characterization

Electrochemical Surface Modification: Thin Films, Functionalization and Characterization

How to Cite

Michaelis, A. (2008) Valve Metal, Si and Ceramic Oxides as Dielectric Films for Passive and Active Electronic Devices, in Electrochemical Surface Modification: Thin Films, Functionalization and Characterization (eds R. C. Alkire, D. M. Kolb, J. Lipkowski and P. N. Ross), Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, Germany. doi: 10.1002/9783527625307.ch1

Editor Information

  1. 2

    Department of Chemical and Biomolecular Engineering, University of Illinois, 600 South Mathews Avenue, Urbana, IL 61801, USA

  2. 3

    University of Ulm, Institute of Electrochemistry, Albert-Einstein-Allee 47, 89081 Ulm, Germany

  3. 4

    University of Guelph, Department of Chemistry, N1G 2W1 Guelph, Ontario, Canada

  4. 5

    Lawrence Berkeley National Laboratory, Materials Science Department, 1 Cyclotron Road MS 2-100, Berkeley, CA 94720-0001, USA

Author Information

  1. Fraunhofer Institute for Ceramic, Technologies and Systems, Winterbergstraße 28, 01277 Dresden, Germany

Publication History

  1. Published Online: 30 OCT 2008
  2. Published Print: 20 AUG 2008

ISBN Information

Print ISBN: 9783527314195

Online ISBN: 9783527625307

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Keywords:

  • advances;
  • electrochemical science;
  • electrochemical engineering;
  • valve metal;
  • Si;
  • ceramic oxides;
  • dielectric films;
  • valve metal systems;
  • Si/SiO2 system

Summary

This chapter contains sections titled:

  • Introduction

  • Fundamentals and Experimental Details

  • Valve Metal Systems

  • Si/SiO2 System

  • Summary and Conclusions

  • References