Chapter 7. Perspectives for the Future

  1. PD Dr. Alexander Horn

Published Online: 12 OCT 2009

DOI: 10.1002/9783527627929.ch7

Book Title

Ultra-Fast Material Metrology

Ultra-Fast Material Metrology

Additional Information

How to Cite

Horn, A. (2009) Perspectives for the Future, in Ultra-Fast Material Metrology, Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, Germany. doi: 10.1002/9783527627929.ch7

Author Information

  1. Kassel University, Institute of Physics, 34132 Kassel, Germany

Publication History

  1. Published Online: 12 OCT 2009
  2. Published Print: 9 SEP 2009

ISBN Information

Print ISBN: 9783527408870

Online ISBN: 9783527627929

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CHAPTER TOOLS

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Keywords:

  • Scanning technology;
  • beam shaping;
  • microtechnologies;
  • optical metrology;
  • nanostructuring

Summary

This chapter contains sections titled:

  • Laser and Other Sources

  • Methodology

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