10. Lifetime-Killing Defects in 4H-SiC Epilayers and Lifetime Control by Low-Energy Electron Irradiation

  1. Dr. Peter Friedrichs2,
  2. Prof. Dr. Tsunenobu Kimoto3,4,
  3. Prof. Dr. Lothar Ley5 and
  4. Dr. Gerhard Pensl6
  1. Prof. Dr. Tsunenobu Kimoto3,4,
  2. Katsunori Danno1 and
  3. Jun Suda1

Published Online: 28 MAR 2011

DOI: 10.1002/9783527629053.ch10

Silicon Carbide: Growth, Defects, and Novel Applications, Volume 1

Silicon Carbide: Growth, Defects, and Novel Applications, Volume 1

How to Cite

Kimoto, T., Danno, K. and Suda, J. (2009) Lifetime-Killing Defects in 4H-SiC Epilayers and Lifetime Control by Low-Energy Electron Irradiation, in Silicon Carbide: Growth, Defects, and Novel Applications, Volume 1 (eds P. Friedrichs, T. Kimoto, L. Ley and G. Pensl), Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, Germany. doi: 10.1002/9783527629053.ch10

Editor Information

  1. 2

    SiCED GmbH& Co. KG, Erlangen, Germany

  2. 3

    Kyoto University, Electronic Science and Engineering, A1-301, Katsura, Nishikyo, Kyoto 615-8501, Japan

  3. 4

    Kyoto University, Photonics and Electronics Science and Engineering Center, Kyotodaigaku-katsura, Nishikyo, Kyoto 615-8510, Japan

  4. 5

    Universität Erlangen–Nürnberg, Lehrstuhl für Technische Physik, Institut für Physik der Kondensierten Materie, Erwin-Rommel-Straße 1, 91058 Erlangen, Germany

  5. 6

    Universität Erlangen–Nürnberg, Lehrstuhl für Angewandte Physik, Staudtstraße 7/A3, 91058 Erlangen, Germany

Author Information

  1. 1

    Kyoto University, Department of Electronic Science and Engineering, Kyotodaigaku-katsura, Nishikyo, Kyoto 615-8510, Japan

  2. 3

    Kyoto University, Electronic Science and Engineering, A1-301, Katsura, Nishikyo, Kyoto 615-8501, Japan

  3. 4

    Kyoto University, Photonics and Electronics Science and Engineering Center, Kyotodaigaku-katsura, Nishikyo, Kyoto 615-8510, Japan

Publication History

  1. Published Online: 28 MAR 2011
  2. Published Print: 21 OCT 2009

ISBN Information

Print ISBN: 9783527409532

Online ISBN: 9783527629053

SEARCH

Keywords:

  • lifetime-killing defects;
  • 4H-SiC epilayers;
  • low-energy electron irradiation

Summary

This chapter contains sections titled:

  • Introduction

  • Experimental

  • Results and discussion

  • Conclusion

  • References