16. Comparative Columnar Porous Etching Studies on n-Type 6H SiC Crystalline Faces

  1. Dr. Peter Friedrichs2,
  2. Prof. Dr. Tsunenobu Kimoto3,4,
  3. Prof. Dr. Lothar Ley5 and
  4. Dr. Gerhard Pensl6
  1. Y. Ke,
  2. R. P. Devaty and
  3. W. J. Choyke

Published Online: 28 MAR 2011

DOI: 10.1002/9783527629053.ch16

Silicon Carbide: Growth, Defects, and Novel Applications, Volume 1

Silicon Carbide: Growth, Defects, and Novel Applications, Volume 1

How to Cite

Ke, Y., Devaty, R. P. and Choyke, W. J. (2009) Comparative Columnar Porous Etching Studies on n-Type 6H SiC Crystalline Faces, in Silicon Carbide: Growth, Defects, and Novel Applications, Volume 1 (eds P. Friedrichs, T. Kimoto, L. Ley and G. Pensl), Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, Germany. doi: 10.1002/9783527629053.ch16

Editor Information

  1. 2

    SiCED GmbH& Co. KG, Erlangen, Germany

  2. 3

    Kyoto University, Electronic Science and Engineering, A1-301, Katsura, Nishikyo, Kyoto 615-8501, Japan

  3. 4

    Kyoto University, Photonics and Electronics Science and Engineering Center, Kyotodaigaku-katsura, Nishikyo, Kyoto 615-8510, Japan

  4. 5

    Universität Erlangen–Nürnberg, Lehrstuhl für Technische Physik, Institut für Physik der Kondensierten Materie, Erwin-Rommel-Straße 1, 91058 Erlangen, Germany

  5. 6

    Universität Erlangen–Nürnberg, Lehrstuhl für Angewandte Physik, Staudtstraße 7/A3, 91058 Erlangen, Germany

Author Information

  1. University of Pittsburgh, Department of Physics and Astronomy, 3941 O'Hara Street, Pittsburgh, PA 15260, USA

Publication History

  1. Published Online: 28 MAR 2011
  2. Published Print: 21 OCT 2009

ISBN Information

Print ISBN: 9783527409532

Online ISBN: 9783527629053

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Keywords:

  • comparative columnar porous etching studies;
  • n-type 6H SiC crystalline faces

Summary

This chapter contains sections titled:

  • Introduction

  • Experimental

  • Results and discussion

  • Summary

  • References