17. Micro- and Nanomechanical Structures for Silicon Carbide MEMS and NEMS

  1. Dr. Peter Friedrichs2,
  2. Prof. Dr. Tsunenobu Kimoto3,4,
  3. Prof. Dr. Lothar Ley5 and
  4. Dr. Gerhard Pensl6
  1. Christian A. Zorman and
  2. Rocco J. Parro

Published Online: 28 MAR 2011

DOI: 10.1002/9783527629053.ch17

Silicon Carbide: Growth, Defects, and Novel Applications, Volume 1

Silicon Carbide: Growth, Defects, and Novel Applications, Volume 1

How to Cite

Zorman, C. A. and Parro, R. J. (2009) Micro- and Nanomechanical Structures for Silicon Carbide MEMS and NEMS, in Silicon Carbide: Growth, Defects, and Novel Applications, Volume 1 (eds P. Friedrichs, T. Kimoto, L. Ley and G. Pensl), Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, Germany. doi: 10.1002/9783527629053.ch17

Editor Information

  1. 2

    SiCED GmbH& Co. KG, Erlangen, Germany

  2. 3

    Kyoto University, Electronic Science and Engineering, A1-301, Katsura, Nishikyo, Kyoto 615-8501, Japan

  3. 4

    Kyoto University, Photonics and Electronics Science and Engineering Center, Kyotodaigaku-katsura, Nishikyo, Kyoto 615-8510, Japan

  4. 5

    Universität Erlangen–Nürnberg, Lehrstuhl für Technische Physik, Institut für Physik der Kondensierten Materie, Erwin-Rommel-Straße 1, 91058 Erlangen, Germany

  5. 6

    Universität Erlangen–Nürnberg, Lehrstuhl für Angewandte Physik, Staudtstraße 7/A3, 91058 Erlangen, Germany

Author Information

  1. Case Western Reserve University, Department of Electrical Engineering and Computer Science, 715A Glennan Building, 10900 Euclid Avenue, Cleveland, OH 44117, USA

Publication History

  1. Published Online: 28 MAR 2011
  2. Published Print: 21 OCT 2009

ISBN Information

Print ISBN: 9783527409532

Online ISBN: 9783527629053

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Keywords:

  • micromechanical structures MEMS;
  • nanomechanical structures NEMS;
  • silicon carbide;
  • single crystalline SiC;
  • polycrystalline SiC;
  • amorphous SiC

Summary

This chapter contains sections titled:

  • Introduction

  • Single crystalline SiC

  • Polycrystalline SiC

  • Amorphous SiC

  • Conclusions

  • References