18. Strategies and Issues on the Plasma Processing of Thin-Film Silicon Solar Cells

  1. Prof. Yoshinobu Kawai Research Professor1,
  2. Prof. Hideo Ikegami Professor Emeritus2,3,
  3. Prof. Noriyoshi Sato Professor Emeritus4,
  4. Prof. Akihisa Matsuda Special Guest Professor Director5,6,
  5. Prof. Kiichiro Uchino Professor7,
  6. Prof. Masayuki Kuzuya Dean Professor8 and
  7. Prof. Akira Mizuno Professor9
  1. Prof. Akihisa Matsuda Special Guest Professor Director5,6

Published Online: 7 OCT 2010

DOI: 10.1002/9783527629749.ch18

Industrial Plasma Technology: Applications from Environmental to Energy Technologies

Industrial Plasma Technology: Applications from Environmental to Energy Technologies

How to Cite

Matsuda, A. (2010) Strategies and Issues on the Plasma Processing of Thin-Film Silicon Solar Cells, in Industrial Plasma Technology: Applications from Environmental to Energy Technologies (eds Y. Kawai, H. Ikegami, N. Sato, A. Matsuda, K. Uchino, M. Kuzuya and A. Mizuno), Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, Germany. doi: 10.1002/9783527629749.ch18

Editor Information

  1. 1

    Kyushu University, Interdisciplinary Graduate School of Engineering Sciences, Kasugakoen 6-1, Kasuga, 816-8580, Japan

  2. 2

    Technowave Inc., 13-18 Aoi 1-chome, Higashi-ku, Nagoya-shi Aichi 461-0004, Japan

  3. 3

    Nagoya University and National Institute for Fusion Science, Shiga 24-601, Nagoya 462-0037, Japan

  4. 4

    Graduate School of Engineering, Tohoku University, Kadan 4-17-113, Sendai 980-0815, Japan

  5. 5

    Osaka University, Grad. School of Engineering Science, Machikaneyama-cho 1-3, Toyonaka, Osaka 565-0871, Japan

  6. 6

    Osaka University, Graduate School of Engineering Science, Toyonaka, Osaka, 560-8531, Japan

  7. 7

    Kyushu University, Interdisciplinary Graduate School of Engineering Sciences, Kasugakoen 6-1, Kasuga, Fukuoka 816-8580, Japan

  8. 8

    Matsuyama University, Department of Pharmaceutical Physical Chemistry, Faculty of Pharmaceutical Sciences, 4-2 Bunkyo-cho, Matsuyama, Ehime 790-8578, Japan

  9. 9

    Toyohashi University of Technology, Department of Ecological Engineering, Hibarigaoka 1-1, Tempaku-cho, Toyohashi, Aichi, 441–8580, Japan

Author Information

  1. 5

    Osaka University, Grad. School of Engineering Science, Machikaneyama-cho 1-3, Toyonaka, Osaka 565-0871, Japan

  2. 6

    Osaka University, Graduate School of Engineering Science, Toyonaka, Osaka, 560-8531, Japan

Publication History

  1. Published Online: 7 OCT 2010
  2. Published Print: 10 MAR 2010

ISBN Information

Print ISBN: 9783527325443

Online ISBN: 9783527629749

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