22. Introduction to Diamond-Like Carbons

  1. Prof. Yoshinobu Kawai Research Professor2,
  2. Prof. Hideo Ikegami Professor Emeritus3,4,
  3. Prof. Noriyoshi Sato Professor Emeritus5,
  4. Prof. Akihisa Matsuda Special Guest Professor Director6,7,
  5. Prof. Kiichiro Uchino Professor8,
  6. Prof. Masayuki Kuzuya Dean Professor9 and
  7. Prof. Akira Mizuno Professor10
  1. Masaru Hori

Published Online: 7 OCT 2010

DOI: 10.1002/9783527629749.ch22

Industrial Plasma Technology: Applications from Environmental to Energy Technologies

Industrial Plasma Technology: Applications from Environmental to Energy Technologies

How to Cite

Hori, M. (2010) Introduction to Diamond-Like Carbons, in Industrial Plasma Technology: Applications from Environmental to Energy Technologies (eds Y. Kawai, H. Ikegami, N. Sato, A. Matsuda, K. Uchino, M. Kuzuya and A. Mizuno), Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, Germany. doi: 10.1002/9783527629749.ch22

Editor Information

  1. 2

    Kyushu University, Interdisciplinary Graduate School of Engineering Sciences, Kasugakoen 6-1, Kasuga, 816-8580, Japan

  2. 3

    Technowave Inc., 13-18 Aoi 1-chome, Higashi-ku, Nagoya-shi Aichi 461-0004, Japan

  3. 4

    Nagoya University and National Institute for Fusion Science, Shiga 24-601, Nagoya 462-0037, Japan

  4. 5

    Graduate School of Engineering, Tohoku University, Kadan 4-17-113, Sendai 980-0815, Japan

  5. 6

    Osaka University, Grad. School of Engineering Science, Machikaneyama-cho 1-3, Toyonaka, Osaka 565-0871, Japan

  6. 7

    Osaka University, Graduate School of Engineering Science, Toyonaka, Osaka, 560-8531, Japan

  7. 8

    Kyushu University, Interdisciplinary Graduate School of Engineering Sciences, Kasugakoen 6-1, Kasuga, Fukuoka 816-8580, Japan

  8. 9

    Matsuyama University, Department of Pharmaceutical Physical Chemistry, Faculty of Pharmaceutical Sciences, 4-2 Bunkyo-cho, Matsuyama, Ehime 790-8578, Japan

  9. 10

    Toyohashi University of Technology, Department of Ecological Engineering, Hibarigaoka 1-1, Tempaku-cho, Toyohashi, Aichi, 441–8580, Japan

Author Information

  1. Nagoya University, Department of Electrical, Engineering and Computer Science, Furu-cho, Chikusa-ku, Nagoya 464-8603, Japan

Publication History

  1. Published Online: 7 OCT 2010
  2. Published Print: 10 MAR 2010

ISBN Information

Print ISBN: 9783527325443

Online ISBN: 9783527629749

SEARCH

Keywords:

  • diamond-like carbon;
  • sp3 bonding structure;
  • ultralarge integrated circuits;
  • plasma science;
  • sputtering technology;
  • vacuum arc evaporation technology