33. Crystallized Nanodust Particles Growth in Low-Pressure Cold Plasmas

  1. Prof. Yoshinobu Kawai Research Professor2,
  2. Prof. Hideo Ikegami Professor Emeritus3,4,
  3. Prof. Noriyoshi Sato Professor Emeritus5,
  4. Prof. Akihisa Matsuda Special Guest Professor Director6,7,
  5. Prof. Kiichiro Uchino Professor8,
  6. Prof. Masayuki Kuzuya Dean Professor9 and
  7. Prof. Akira Mizuno Professor10
  1. Laïfa Boufendi,
  2. Marie Christine Jouanny,
  3. Marjory Cavarroc,
  4. Abdelaziz Mezeghrane,
  5. Maxime Mikikian and
  6. Yves Tessier

Published Online: 7 OCT 2010

DOI: 10.1002/9783527629749.ch33

Industrial Plasma Technology: Applications from Environmental to Energy Technologies

Industrial Plasma Technology: Applications from Environmental to Energy Technologies

How to Cite

Boufendi, L., Christine Jouanny, M., Cavarroc, M., Mezeghrane, A., Mikikian, M. and Tessier, Y. (2010) Crystallized Nanodust Particles Growth in Low-Pressure Cold Plasmas, in Industrial Plasma Technology: Applications from Environmental to Energy Technologies (eds Y. Kawai, H. Ikegami, N. Sato, A. Matsuda, K. Uchino, M. Kuzuya and A. Mizuno), Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, Germany. doi: 10.1002/9783527629749.ch33

Editor Information

  1. 2

    Kyushu University, Interdisciplinary Graduate School of Engineering Sciences, Kasugakoen 6-1, Kasuga, 816-8580, Japan

  2. 3

    Technowave Inc., 13-18 Aoi 1-chome, Higashi-ku, Nagoya-shi Aichi 461-0004, Japan

  3. 4

    Nagoya University and National Institute for Fusion Science, Shiga 24-601, Nagoya 462-0037, Japan

  4. 5

    Graduate School of Engineering, Tohoku University, Kadan 4-17-113, Sendai 980-0815, Japan

  5. 6

    Osaka University, Grad. School of Engineering Science, Machikaneyama-cho 1-3, Toyonaka, Osaka 565-0871, Japan

  6. 7

    Osaka University, Graduate School of Engineering Science, Toyonaka, Osaka, 560-8531, Japan

  7. 8

    Kyushu University, Interdisciplinary Graduate School of Engineering Sciences, Kasugakoen 6-1, Kasuga, Fukuoka 816-8580, Japan

  8. 9

    Matsuyama University, Department of Pharmaceutical Physical Chemistry, Faculty of Pharmaceutical Sciences, 4-2 Bunkyo-cho, Matsuyama, Ehime 790-8578, Japan

  9. 10

    Toyohashi University of Technology, Department of Ecological Engineering, Hibarigaoka 1-1, Tempaku-cho, Toyohashi, Aichi, 441–8580, Japan

Author Information

  1. Orléans University, GREMI Laboratory, PB 6744, 45067 Orléans Cedex 2, France

Publication History

  1. Published Online: 7 OCT 2010
  2. Published Print: 10 MAR 2010

ISBN Information

Print ISBN: 9783527325443

Online ISBN: 9783527629749

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Keywords:

  • silicon nanocrystallites;
  • silane-based plasma;
  • RF discharge;
  • nucleation and agglomeration phase;
  • low-pressure plasma

Summary

This chapter contains sections titled:

  • Introduction

  • Description of the Experimental Setup

  • Detection of Nanocrystallites Formation in the Plasma Gas Phase

  • Atomic Structure of the Nanocrystallites

  • Size and Crystalline Volume Fraction Measurements

  • Gas Temperature Effects on Dust Nanoparticle Nucleation and Growth

  • Conclusion

  • References