7. Polymers for Microelectronics

  1. Prof. Dr. Krzysztof Matyjaszewski3,
  2. Prof. Dr. Yves Gnanou4,
  3. Prof. Dr. Ludwik Leibler5,6
  1. Christopher W. Bielawski1,
  2. C. Grant Willson2

Published Online: 23 SEP 2011

DOI: 10.1002/9783527631421.ch54

Book Title

Macromolecular Engineering: Precise Synthesis, Materials Properties, Applications

Macromolecular Engineering: Precise Synthesis, Materials Properties, Applications

Additional Information

How to Cite

Bielawski, C. W. and Willson, C. G. (2007) Polymers for Microelectronics, in Macromolecular Engineering: Precise Synthesis, Materials Properties, Applications (eds K. Matyjaszewski, Y. Gnanou and L. Leibler), Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, Germany. doi: 10.1002/9783527631421.ch54

Editor Information

  1. 3

    Carnegie Mellon University, Department of Chemistry, 4400 Fifth Avenue, Pittsburgh, PA 15213, USA

  2. 4

    Université Bordeaux 1, Laboratoire de Chimie des Polymères Organiques, ENSCPB, 16 avenue Pey-Berland, 33607 Pessac, France

  3. 5

    Matière Molle et Chimie, UMR 167 CNRS, ESPCI, 10 rue Vauquelin, 75005 Paris, France

  4. 6

    UMR 167 CNRS-ESPCI École Supérieure de Physique et Chimie Industrielles, 10 rue Vauquelin, 75231 Paris Cedex 05, France

Author Information

  1. 1

    The University of Texas at Austin, Department of Chemistry and Biochemistry, Austin, TX 78712, USA

  2. 2

    The University of Texas at Austin, Departments of Chemistry and Biochemistry and Chemical Engineering, Austin, TX 78712, USA

Publication History

  1. Published Online: 23 SEP 2011
  2. Published Print: 23 FEB 2007

ISBN Information

Print ISBN: 9783527314461

Online ISBN: 9783527631421

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CHAPTER TOOLS

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Keywords:

  • polymers;
  • microelectronics;
  • conjugated polymers;
  • polymeric dielectrics;
  • microlithographic applications

Summary

This chapter contains sections titled:

  • Introduction

  • Conjugated Polymers

  • Polymeric Dielectrics

  • Resists in Microlithographic Applications

  • Conclusions

  • References

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