8. Diagnostic Methods

  1. Dr. John Ernest Harry

Published Online: 11 OCT 2010

DOI: 10.1002/9783527632169.ch8

Introduction to Plasma Technology: Science, Engineering and Applications

Introduction to Plasma Technology: Science, Engineering and Applications

How to Cite

Harry, J. E. (2010) Diagnostic Methods, in Introduction to Plasma Technology: Science, Engineering and Applications, Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, Germany. doi: 10.1002/9783527632169.ch8

Author Information

  1. Highview, Knossington Road, Braunston, Oakham, Rutland LE15 8QX, United Kingdom

Publication History

  1. Published Online: 11 OCT 2010
  2. Published Print: 13 OCT 2010

ISBN Information

Print ISBN: 9783527327638

Online ISBN: 9783527632169

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Keywords:

  • plasma diagnostics;
  • neutral particle density;
  • optical spectroscopy;
  • interferometer;
  • mass spectrometry;
  • electrical measurements

Summary

This chapter contains sections titled:

  • Introduction

  • Neutral Particle Density Measurement

  • Probes and Sensors

  • Optical Spectroscopy

  • Interferometry

  • Mass Spectrometry

  • Electrical Measurements

  • Further Reading