13. Patterning by Photolithography
- Prof. Dr. Wolfgang Knoll3 and
- Prof. Dr. Rigoberto C. Advincula4
Published Online: 7 JUN 2011
Copyright © 2011 Wiley-VCH Verlag GmbH & Co. KGaA
Functional Polymer Films: 2 Volume Set
How to Cite
De Silva, A. and Ober, C. K. (2011) Patterning by Photolithography, in Functional Polymer Films: 2 Volume Set (eds W. Knoll and R. C. Advincula), Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, Germany. doi: 10.1002/9783527638482.ch13
AIT Austrian Institute of Technology GmbH, Donau-City-Straße 1, 1220 Vienna, Austria
University of Houston, Department of Chemistry, Department of Chemical and Biomolecular Engineering, 136 Fleming Bldg., Houston, TX 77204-5003, USA
- Published Online: 7 JUN 2011
- Published Print: 20 APR 2011
Print ISBN: 9783527321902
Online ISBN: 9783527638482
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