13. Patterning by Photolithography

  1. Prof. Dr. Wolfgang Knoll3 and
  2. Prof. Dr. Rigoberto C. Advincula4
  1. Anuja De Silva1 and
  2. Christopher K. Ober2

Published Online: 7 JUN 2011

DOI: 10.1002/9783527638482.ch13

Functional Polymer Films: 2 Volume Set

Functional Polymer Films: 2 Volume Set

How to Cite

De Silva, A. and Ober, C. K. (2011) Patterning by Photolithography, in Functional Polymer Films: 2 Volume Set (eds W. Knoll and R. C. Advincula), Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, Germany. doi: 10.1002/9783527638482.ch13

Editor Information

  1. 3

    AIT Austrian Institute of Technology GmbH, Donau-City-Straße 1, 1220 Vienna, Austria

  2. 4

    University of Houston, Department of Chemistry, Department of Chemical and Biomolecular Engineering, 136 Fleming Bldg., Houston, TX 77204-5003, USA

Author Information

  1. 1

    Cornell University Department of Chemistry and Chemical Biology 116 Baker Laboratory Ithaca, NY 14850, USA

  2. 2

    Cornell University Department of Materials Science and Engineering 310 Bard Hall Ithaca, NY 14850, USA

Publication History

  1. Published Online: 7 JUN 2011
  2. Published Print: 20 APR 2011

ISBN Information

Print ISBN: 9783527321902

Online ISBN: 9783527638482

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