7. Raman Spectroscopy: Basics and Applications

  1. Dr. Subhash Chandra Singh3,
  2. Prof. Haibo Zeng4,
  3. Prof. Chunlei Guo5 and
  4. Prof. Weiping Cai6
  1. Patrick J. McNally1 and
  2. Vasant G. Sathe2

Published Online: 23 AUG 2012

DOI: 10.1002/9783527646821.ch7

Nanomaterials: Processing and Characterization with Lasers

Nanomaterials: Processing and Characterization with Lasers

How to Cite

McNally, P. J. and Sathe, V. G. (2012) Raman Spectroscopy: Basics and Applications, in Nanomaterials: Processing and Characterization with Lasers (eds S. C. Singh, H. Zeng, C. Guo and W. Cai), Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, Germany. doi: 10.1002/9783527646821.ch7

Editor Information

  1. 3

    National Centre for Plasma Science and Technology & School of Physical Sciences, Dublin City University, Dublin-9, Ireland

  2. 4

    Nanjing University of Aeronautics and Astronautics, State Key Laboratory of Mechanics and Control of Mechanical Structures, Key Laboratory for Intelligent Nano Materials and Devices of the Ministry of Education, College of Material Science and Technology, Yudao Street 29, Nanjing 210016, People's Republic of China

  3. 5

    University of Rochester, The Institute of Optics, 275, Hutchison Road, Rochester, NY 14627-0186, USA

  4. 6

    Key Laboratory of Materials Physics, Institute of Solid State Physics, Chinese Academy of Sciences, 350 Shushanghu Road, Hefei, Anhui 230031, China

Author Information

  1. 1

    Dublin City University, Nanomaterials Processing Laboratory, The Rince Institute, School of Electronic Engineering, Dublin 9, Ireland

  2. 2

    University Campus, UGC-DAE Consortium for Scientific Research, Khandwa Road, Indore-452017, Madhya Pradesh, India

Publication History

  1. Published Online: 23 AUG 2012
  2. Published Print: 22 AUG 2012

ISBN Information

Print ISBN: 9783527327157

Online ISBN: 9783527646821



  • CMOS devices;
  • micro-Raman spectroscopy;
  • Raman shifts;
  • front-end processing;
  • X-ray diffraction;
  • STI trenches


This chapter contains sections titled:

  • Raman Spectroscopy and its Application in the Characterization of Semiconductor Devices

  • Effect of Particle Size Reduction on Raman Spectra

  • Acknowledgments

  • References