13. Model-Based Optical Metrology

  1. Prof. Dr. Wolfgang Osten2 and
  2. Dr. Nadya Reingand3
  1. Xavier Colonna de Lega

Published Online: 23 AUG 2012

DOI: 10.1002/9783527648443.ch13

Optical Imaging and Metrology: Advanced Technologies

Optical Imaging and Metrology: Advanced Technologies

How to Cite

Colonna de Lega, X. (2012) Model-Based Optical Metrology, in Optical Imaging and Metrology: Advanced Technologies (eds W. Osten and N. Reingand), Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, Germany. doi: 10.1002/9783527648443.ch13

Editor Information

  1. 2

    Universität Stuttgart, Institut für Technische Optik, Pfaffenwaldring 9, 70569 Stuttgart, Germany

  2. 3

    CeLight Inc., 12200 Tech Rd., Ste. 200, Silver Spring, MD 20904, USA

Author Information

  1. ZYGO Corporation, Laurel Brook Road, Middlefield, CT 06455, USA

Publication History

  1. Published Online: 23 AUG 2012
  2. Published Print: 22 AUG 2012

ISBN Information

Print ISBN: 9783527410644

Online ISBN: 9783527648443

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Keywords:

  • coherence scanning interferometry;
  • optical metrology;
  • interferometry;
  • ellipsometry;
  • scatterometry;
  • forward and inverse models

Summary

This chapter contains sections titled:

  • Introduction

  • Optical Metrology

  • Modeling Light–Sample Interaction

  • Forward Models in Optical Metrology

  • Inverse Models in Optical Metrology

  • Confidence in Inverse Model Metrology

  • Conclusion and Perspectives

  • References