14. Advanced MEMS Inspection by Direct and Indirect Solution Strategies

  1. Prof. Dr. Wolfgang Osten2 and
  2. Dr. Nadya Reingand3
  1. Ryszard J. Pryputniewicz

Published Online: 23 AUG 2012

DOI: 10.1002/9783527648443.ch14

Optical Imaging and Metrology: Advanced Technologies

Optical Imaging and Metrology: Advanced Technologies

How to Cite

Pryputniewicz, R. J. (2012) Advanced MEMS Inspection by Direct and Indirect Solution Strategies, in Optical Imaging and Metrology: Advanced Technologies (eds W. Osten and N. Reingand), Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, Germany. doi: 10.1002/9783527648443.ch14

Editor Information

  1. 2

    Universität Stuttgart, Institut für Technische Optik, Pfaffenwaldring 9, 70569 Stuttgart, Germany

  2. 3

    CeLight Inc., 12200 Tech Rd., Ste. 200, Silver Spring, MD 20904, USA

Author Information

  1. Department of Mechanical Engineering, CHSLT, School of Engineering, Worcester Polytechnic Institute, 100 Institute Road, Worcester, MA 01609, USA

Publication History

  1. Published Online: 23 AUG 2012
  2. Published Print: 22 AUG 2012

ISBN Information

Print ISBN: 9783527410644

Online ISBN: 9783527648443

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Keywords:

  • MEMS;
  • gyroscopes;
  • accelerometers;
  • direct and indirect solution strategies;
  • multiscale analysis;
  • vibrations;
  • noninvasive measurements;
  • full-field-of-view

Summary

This chapter contains sections titled:

  • Introduction

  • ACES Methodology

  • MEMS Samples Used

  • Representative Results

  • Conclusions and Recommendations

  • Acknowledgments

  • References