15. Different Ways to Overcome the Resolution Problem in Optical Micro and Nano Metrology

  1. Prof. Dr. Wolfgang Osten2 and
  2. Dr. Nadya Reingand3
  1. Prof. Dr. Wolfgang Osten

Published Online: 23 AUG 2012

DOI: 10.1002/9783527648443.ch15

Optical Imaging and Metrology: Advanced Technologies

Optical Imaging and Metrology: Advanced Technologies

How to Cite

Osten, W. (2012) Different Ways to Overcome the Resolution Problem in Optical Micro and Nano Metrology, in Optical Imaging and Metrology: Advanced Technologies (eds W. Osten and N. Reingand), Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, Germany. doi: 10.1002/9783527648443.ch15

Editor Information

  1. 2

    Universität Stuttgart, Institut für Technische Optik, Pfaffenwaldring 9, 70569 Stuttgart, Germany

  2. 3

    CeLight Inc., 12200 Tech Rd., Ste. 200, Silver Spring, MD 20904, USA

Author Information

  1. Universität Stuttgart, Institut für Technische Optik, Pfaffenwaldring 9, 70569 Stuttgart, Germany

Publication History

  1. Published Online: 23 AUG 2012
  2. Published Print: 22 AUG 2012

ISBN Information

Print ISBN: 9783527410644

Online ISBN: 9783527648443

SEARCH

Options for accessing this content:

  • If you are a society or association member and require assistance with obtaining online access instructions please contact our Journal Customer Services team.
    http://wiley.force.com/Interface/ContactJournalCustomerServices_V2.
  • Login via other institutional login options http://onlinelibrary.wiley.com/login-options.
  • You can purchase online access to this Chapter for a 24-hour period (price varies by title)
    • If you already have a Wiley Online Library or Wiley InterScience user account: login above and proceed to purchase the article.
    • New Users: Please register, then proceed to purchase the article.

Login via OpenAthens

or

Search for your institution's name below to login via Shibboleth.

Please register to:

  • Save publications, articles and searches
  • Get email alerts
  • Get all the benefits mentioned below!

Register now >